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UCL CMOS SOI

@CMOS_SOI

#P1206 Aluminium deposited on batch, and process on hold for easter hollidays


#P1206 wafers sent to IBS for p-type S&D implantation.


#P1206 implanation: waiting an answer from IEMN...


#P1206 Looking for a solution for the S&D ionic implantation...


#P1206 LITHO poly done...waiting for the etching...


#P1206 LPCVD polysilicon deposited on the whole batch.


#P1206 ALD Al2O3 deposited on extremely thin SiO2 as gate dielectrics, trial on one wafer.


#P1206 wafers came back from IBS. Next step is final gate oxidation & polysilicon deposition.


#P1206 wafers are ready to be sent to IBS for the second channel implantation.


#P1206 Wafers are in the Koyo furnace for MOS gate oxidation.


#P1206 Silicon nitride deposition for membrane fabrication


#P1206 BOX etched to create PIN diode and TRAPPISTe device.


#P1206 LOCOS isolation performed on all wafers with two recipes for comparaison


#P1206 Experimenting a new recipe for LOCOS isolation


New CMOS process #P1206 started in June...(never too late to let you know :) )


UCL CMOS SOI reposted

Asked if there were significant differences between finfet transistors and fully depleted SOI transistors - the... fb.me/1kfUeE5MU


#P1103 Great news,the UCL CMOS SOI is back on tracks. Threshold voltage are again back to normal values.... :-D


#P1103 Contact Pad opening...process will be terminated on Monday 14/11


#P1103 wafers are ready for contact pre-tests on monday.


#P1103 Doing the aluminium etching...it is much better today


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